Northeastern University Welcome Center Space, 75 E Santa Clara Street, San Jose, California, United States, 95113, Virtual: https://events.vtools.ieee.org/m/437916

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Microchannel Particle Deposition (MPD) used for MEMS and Sensors

Northeastern University Welcome Center Space, 75 E Santa Clara Street, San Jose, California, United States, 95113, Virtual: https://events.vtools.ieee.org/m/437916

Abstract Microchannel particle deposition (MPD) is a wafer-scale thick-film deposition process used to accurately and […]