Prescriptive Maintenance in Semiconductor Manufacturing: A Shift from Reactive to Intelligent Systems

Abstract:
Semiconductor Tool maintenance is a complex task due to process complexity, process integration challenges, and customer requirements. Historically, maintenance strategies have been reactive due to these complexities. Applied Materials has been focused on moving from a generally reactive method of reacting to tool issues to prescriptive methods of maintaining process equipment. This migration is through a combination of advanced anomaly detection techniques which provide low false positives, methods of translating fail modes into Reactive Useful Life estimates and ultimately prescribing solutions to issues in advance using Generative Artificial Intelligence. This discussion will cover some of the challenges and solutions to this framework.
Speaker(s): Mike,
Agenda:
6:00 – 6:30 – Networking and light dinner (for in person attendees)
6:30 – 7:30 – Talk and Q & A
7:30 – 8:00 – Wrap up and Networking
Room: SCDI 4010, Bldg: Sobrato Campus for Discovery and Innovation, Santa Clara University, 500 El Camino Real, Santa Clara, California, United States, 95053, Virtual: https://events.vtools.ieee.org/m/506966