Prescriptive Maintenance in Semiconductor Manufacturing: A Shift from Reactive to Intelligent Systems
Room: SCDI 4010, Bldg: Sobrato Campus for Discovery and Innovation, Santa Clara University, 500 El Camino Real, Santa Clara, California, United States, 95053, Virtual: https://events.vtools.ieee.org/m/506966Abstract: Semiconductor Tool maintenance is a complex task due to process complexity, process integration challenges, and customer requirements. Historically, maintenance strategies have been reactive due to these complexities. Applied Materials has been focused on moving from a generally reactive method of reacting to tool issues to prescriptive methods of maintaining process equipment. This migration is […]
